Title:
SENSOR WITH EXOTHERMIC THIN FILM ELEMENT
Document Type and Number:
Japanese Patent JP3953156
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a sensor having a long-life exothermic thin film element.
SOLUTION: The sensor comprises an Si substrate 10 having a hollow 102 and exothermic thin film element 104 supported on the surface of the Si substrate 101 surrounding the hollow 102 so as to locate an exothermic part 106a over the hollow 102. This element 104 is composed of a lower insulation film 105 made from a thin film, conductive film 106 including an exothermic pattern which forms a thin film-made exothermic part 106a on the insulation film 105 and conductive pattern for feeding a current to the exothermic pattern, and upper insulation thin film 107 so as to sandwich the conductive film 106 with the lower insulation film 105. Both insulation films 105, 107 are made of siliconoxynitrite SiOxNy.
Inventors:
Tetsuya Sumiya
Application Number:
JP29419297A
Publication Date:
August 08, 2007
Filing Date:
October 27, 1997
Export Citation:
Assignee:
Hokuriku Electric Industry Co., Ltd.
International Classes:
G01F1/68; G01F1/692; G01N27/18; H01C7/00; H01L37/00; (IPC1-7): G01F1/68; G01N27/18; H01C7/00; H01L37/00
Domestic Patent References:
| JP6147969A | ||||
| JP8210890A | ||||
| JP7055522A |
Attorney, Agent or Firm:
西浦 ▲嗣▼晴
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