Title:
Sensor
Document Type and Number:
Japanese Patent JP6142593
Kind Code:
B2
Abstract:
A sensor includes a first electrode, a second electrode, a ferroelectric element that is disposed between the first electrode and the second electrode and that has a ferroelectric film formed of a ferroelectric substance, and a detector configured to read an electric charge generated in the ferroelectric element. The detector performs reading by applying a first voltage for aligning polarization directions of the ferroelectric film and a second voltage for reversing polarization of at least part of the ferroelectric film whose polarization directions have been aligned.
Inventors:
▲濱▼田 泰彰
Application Number:
JP2013053231A
Publication Date:
June 07, 2017
Filing Date:
March 15, 2013
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01J1/02; H01L37/02
Domestic Patent References:
| JP2000019013A | ||||
| JP6265411A | ||||
| JP60050427A | ||||
| JP2002343791A | ||||
| JP9245525A | ||||
| JP5024994A | ||||
| JP2000055746A |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai
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