SENSOR

Japanese Patent JPH04158220

A

PURPOSE:To improve durability by a construction wherein a base plate is provided with holes recessed or pierced in the direction of the thickness of the plate, terminal parts are formed in these holes by filling up a metal therein, and a conductor is made continuous to the terminal parts, while lead wires are fixed to the terminal parts. CONSTITUTION:Terminal holes 5A and 5B are formed in prescribed spots of a base plate 2 such as a ceramic plate. In these holes 5A and 5B, small lumps 7A and 7B of a metal, preferably platinum, having substantially the same shape with these holes are fitted and baked temporarily. Next, a conductor such as platinum paste is printed in a prescribed pattern and baked and the end parts of the conductor 3 of platinum are formed so that they are continuous to terminal parts 6A and 6B formed of the small lumps 7A and 7B. In the case when water resistance is required for a sensor, in particular, a glass agent is applied on the whole surface of the plate 2 except the terminal parts 6A and 6B and baked. Thereafter, lead wires 4A and 4B are put on the terminal parts 6A and 6B respectively and fixed thereto by spot welding, and thereby the sensor 1 is obtained. Furthermore, a protective film is formed on the whole surface of the plate 2 by applying a thermosetting resin agent thereon to set it, or by other means, and thereby the water resistance, corrosion resistance and durability are increased.

JPH1183585	AIR FLOW MEASURING DEVICE
WO/2002/018884	MICROSENSOR FOR MEASURING VELOCITY AND ANGULAR DIRECTION OF AN INCOMING AIR STREAM
JP3184402	THERMAL AIR FLOWMETER

TOTOKI TOSHIO
YASUKAWA KATSUO
SHIGEMI KOKI

JP28372590A

June 01, 1992

October 22, 1990

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KURITA WATER IND LTD

G01P5/12; G01D21/00; G01F1/68; G01F1/696; (IPC1-7): G01F1/68; G01P5/12

Tsuyoshi Shigeno

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