Title:
SENSOR
Document Type and Number:
Japanese Patent JPS63289430
Kind Code:
A
Abstract:
A solid state sensor (10), for sensing a physical parameter such as pressure, comprises a resonantly vibratable beam (18) formed across a cavity in a substrate (12) by micro-machining, and arranged such that changes in the parameter vary its resonant frequency. The beam (18) either consists of or has deposited on it a material exhibiting piezo-electric effect, so that vibration of the beam can be excited by using the effect. This is achieved using light (24), either by forming a photodiode in the substrate in or near the beam, so that illuminating the photodiode causes a voltage to be applied to the beam, or, in the case where the piezo-electric material exhibits surface piezo-electric effect, by directly illuminating the beam.
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Inventors:
HAWAADO ANSONII DORII
BURONISUROO JIYAN SHIYUSUKI
BURONISUROO JIYAN SHIYUSUKI
Application Number:
JP1436688A
Publication Date:
November 25, 1988
Filing Date:
January 25, 1988
Export Citation:
Assignee:
SCHLUMBERGER ELECTRONICS UK
International Classes:
G01L1/10; G01L1/16; G01L1/18; G01L9/00; (IPC1-7): G01L1/10
Attorney, Agent or Firm:
Minoru Nakamura (4 outside)