Title:
圧力と加速度との双方を検出するセンサおよびその製造方法
Document Type and Number:
Japanese Patent JP4335545
Kind Code:
B2
Inventors:
Kazuhiro Okada
Application Number:
JP2003037757A
Publication Date:
September 30, 2009
Filing Date:
February 17, 2003
Export Citation:
Assignee:
Wako Co., Ltd.
International Classes:
G01L9/00; G01P15/12; G01D21/02; G01P15/125; H01L29/84
Domestic Patent References:
| JP10170375A | ||||
| JP4174333A | ||||
| JP2002116106A | ||||
| JP3113337A |
Attorney, Agent or Firm:
Hiroshi Shimura
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