Title:
SEPARATION APPARATUS
Document Type and Number:
Japanese Patent JP2012081385
Kind Code:
A
Abstract:
To provide a separation apparatus that can efficiently separate a waste fluid containing silicon wastes into the silicon wastes and water in an easily recyclable state.
The separation apparatus includes: a liquid tank 21 for storing the waste fluid where water contains silicon wastes; and a silicon separation mechanism 22 disposed in the liquid tank 21. The silicon separation mechanism 22 includes: an adsorption plate 25 provided in the liquid tank 21 and adsorbing silicon wastes in the waste fluid; a silicon passing regulating device 26 that permits only the water in the waste fluid to pass and controls the passing of silicon wastes; an adsorption plate moving device 30; and a separator 40.
Inventors:
ISHIGURO HIROTAKA
YOSHIDA MIKI
FURONAKA TAKESHI
YOSHIDA MIKI
FURONAKA TAKESHI
Application Number:
JP2010227852A
Publication Date:
April 26, 2012
Filing Date:
October 07, 2010
Export Citation:
Assignee:
DISCO CORP
International Classes:
B03C5/02
Domestic Patent References:
| JPH0748827A | 1995-02-21 | |||
| JPH08164304A | 1996-06-25 | |||
| JP2002177819A | 2002-06-25 | |||
| JP2012024661A | 2012-02-09 | |||
| JPS264512B1 | ||||
| JPS5263177A | 1977-05-25 | |||
| JP2000117147A | 2000-04-25 | |||
| JPH11253838A | 1999-09-21 | |||
| JPH01245868A | 1989-10-02 | |||
| JP2007283248A | 2007-11-01 |
Foreign References:
| DE102008010951A1 | 2009-08-27 |
Attorney, Agent or Firm:
Hiroaki Sakai