Title:
SEPARATION DEVICE AND SEPARATION METHOD
Document Type and Number:
Japanese Patent JP2019179847
Kind Code:
A
Abstract:
To provide a technique capable of appropriately widening a mutual interval between to-be-adhered objects.SOLUTION: A separation device EA for expanding a mutual interval between a plurality of to-be-adhered objects CP affixed to one surface AS1 of an adhesive sheet AS, includes: holding means 10 for holding an end of the adhesive sheet AS; contact means 20 having a contact member 21 that contacts the adhesive sheet AS; and separation means 30 for applying tension to the adhesive sheet AS to widen the mutual interval between the to-be-adhered objects CP by relatively moving the holding means 10 holding the end of the adhesive sheet AS and the contact means 20. The contact member 21 has irregularities 21B formed on part or all of a sliding portion 21A on which the adhesive sheet AS slides.SELECTED DRAWING: Figure 1
Inventors:
SUGISHITA YOSHIAKI
Application Number:
JP2018068186A
Publication Date:
October 17, 2019
Filing Date:
March 30, 2018
Export Citation:
Assignee:
LINTEC CORP
International Classes:
H01L21/301; H01L21/683
Domestic Patent References:
| JP2007081352A | 2007-03-29 | |||
| JPS5793146U | 1982-06-08 | |||
| JPH08102452A | 1996-04-16 |
Attorney, Agent or Firm:
Takahiro Yamazaki
Ozuhara Shin Kozue
Noriko Kakuda
Ozuhara Shin Kozue
Noriko Kakuda