PURPOSE: To contrive to reduce the cost and required power of a rotary motion part, by subjecting a plurality of parallelly arranged adsorbing and desorbing towers to change-over operation with phase difference by a compressor and a plurality of vacuum pumps each of which is operated by the same drive source.
CONSTITUTION: Desorption valves VA1, VB2... connected to a stock material charging compressor 1, desorption valves VA2, VB2... connected to a suction pump 2, desorption valves VA3, VB3... connected to a suction pump 3 and desorption valves VA4, VB4... connected to a suction pump 4 are respectively provided to a plurality of adsorbing and desorbing towers A, B each packed with a gas adsorbent in parallel. After stock gas is adsorbed with the tower A through the compressor 1, the valves V A1... are closed and valves 8, 9 are opened to equalize the pressure of the tower A to that of towers E... and, thereafter, suction pumps 2, 3, 4 are changed over to perform desorption under respective vacuum degrees. The above-mentioned compressor 1 and the suction pumps 2... are respectively subjected to stable and rating lower power operation by a common drive body 7.
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KAWAGUCHI KATSUYUKI
IDAKA HIDEHIKO