Title:
EUV源におけるデブリ抑制用影つけ電極(shadowingelectrode)
Document Type and Number:
Japanese Patent JP4875753
Kind Code:
B2
Abstract:
A radiation source having self-shading electrodes is disclosed. Debris originating from the electrodes is reduced. The path from the electrodes to the EUV optics is blocked by part of the electrodes themselves (termed self-shading). This may significantly reduce the amount of electrode-generated debris.
Inventors:
Van Harpen, Marten, Marinus, Johannes, Wilhelms
Sur, Wouter, Anton
Sur, Wouter, Anton
Application Number:
JP2009540185A
Publication Date:
February 15, 2012
Filing Date:
November 21, 2007
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G03F7/20; H05G2/00
Domestic Patent References:
| JP2004165155A | 2004-06-10 |
Foreign References:
| WO2005101924A1 | 2005-10-27 | |||
| WO2005025280A2 | 2005-03-17 | |||
| WO2006123270A2 | 2006-11-23 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki