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Title:
SHAFT DRIVING DEVICE
Document Type and Number:
Japanese Patent JP2005220989
Kind Code:
A
Abstract:

To provide a shaft driving device controllable easily, compared with a conventional arrangement which requires complicated control as the rotating speed of a motor must be adjusted in order to suppress the shock given to a wafer.

The shaft driving device has two rotary parts 110 and two conversion parts 120, wherein the rotary parts 110 are equipped with two cylinders 111 connected so that fluid moves freely between their insides, two pistons 112 installed in the cylinders 111 and moved interlocking by the motion of oil between the cylinders 111, and rotary shafts 113 installed to the two pistons 112 in such a way as rotating in compliance with the motions of the pistons 112, while the conversion parts 120 move respective shafts 201 in the axial direction by converting the rotational motions of the rotary shafts 113 into reciprocative motions using cam mechanisms.


Inventors:
Yoshida, Yoshihiro
Asakura, Hiromi
Watanabe, Akizo
Application Number:
JP2004000029270
Publication Date:
August 18, 2005
Filing Date:
February 05, 2004
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
F15B7/00; (IPC1-7): F15B7/00
Domestic Patent References:
JPS51137096U
JPH1137104A
JPS431001B1
JPH0242201A
Attorney, Agent or Firm:
新居 広守



 
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