Title:
Shaft end mounting structure
Document Type and Number:
Japanese Patent JP6085073
Kind Code:
B2
Abstract:
A shaft-end mounting structure according to the present invention is a structure to mount an end of a hollow ceramic shaft 20 in a gastight manner on a circumference of a through hole 104 in a base plate 102 of a chamber 100, the shaft 20 being integrated with a ceramic plate 12 on which a wafer is to be placed. A ring member 26 is connected in a gastight manner to an end face of the shaft 20 with a metal layer 28 provided therebetween, the member 26 being composed of a metal material or a metal-ceramic composite material. Bolts 32 extend through the base plate 102 and a metal seal 30 and fasten the member 26 so as to draw the member 26 toward the base plate 102 while the member 26 is placed on the circumference of the through hole 104 with the seal 30 provided therebetween.
Inventors:
Takebayashi Hiroshi
Application Number:
JP2016570587A
Publication Date:
February 22, 2017
Filing Date:
January 13, 2016
Export Citation:
Assignee:
Nippon Insulator Co., Ltd.
International Classes:
H01L21/683
Domestic Patent References:
| JP2002009079A | 2002-01-11 | |||
| JP2005317749A | 2005-11-10 | |||
| JPH1012711A | 1998-01-16 | |||
| JP2004207465A | 2004-07-22 | |||
| JP2004152865A | 2004-05-27 |
Attorney, Agent or Firm:
Aitec International Patent Office