Title:
SHAFT SEALING DEVICE
Document Type and Number:
Japanese Patent JPS5578859
Kind Code:
A
Abstract:
PURPOSE:To prevent flowing in of gas when the non-contact sealing device is stopped by providing the non-contacting sealing device to prevent gas flow to the air- tight chamber and the contacting sealing device to prevent gas flow, which can be released freely, to the non-contacting sealing device from outside. CONSTITUTION:When the vacuum chamber 1 is kept at high degree of vacuum and the shaft 2 is rotating, the non-contacting sealing device 6 is operated while the contacting sealing device 7 is not operated. In this case, air flowing through between the sealing body 12 and the shaft 2 goes into the sealing port 9, and the chamber 1 is kept vacuum by the groove 10. When the shaft 2 is stopped, the control valve 22 is opened to seal compressed air as the working fluid in the sealing body 12. Although the sealing body 12 tends to expand, it is deformed as the outside is held down by the retaining groove 16, and the inner surface is tightly pressed against the shaft 2 so that the air flow to the vacuum chamber from the atmosphere side can be prevented.
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Inventors:
AIKAWA TETSUO
MORIWAKI SACHIOSA
TERAJIMA SEIJI
MORIWAKI SACHIOSA
TERAJIMA SEIJI
Application Number:
JP15265278A
Publication Date:
June 13, 1980
Filing Date:
December 12, 1978
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
F16J15/447; F16J15/16; F16J15/44; F16J15/46; (IPC1-7): F16J15/16; F16J15/44; F16J15/46
Domestic Patent References:
| JP50126860B | ||||
| JPS494050B1 | 1974-01-30 | |||
| JPS4722340B1 |