Title:
SHAFT SEALING METHOD FOR DRY TYPE VACUUM PUMP
Document Type and Number:
Japanese Patent JPH07286590
Kind Code:
A
Abstract:
PURPOSE: To provide a shaft sealing method for a dry type vacuum pump in which purity of product gas can be maintained, in which oil seal deterioration conditions can be grasped even during operation, and in which running cost is not required.
CONSTITUTION: A middle purge chamber 59 adjacent to a shaft bearing 56 part is sealed, air-discharged product gas is filled, and leak quantity and/or pressure of the product gas is measured, thereby leak conditions of the shaft bearing 56 part are monitored.
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Inventors:
TAKEDA TAKU
WAKAMURA OSAMU
WAKAMURA OSAMU
Application Number:
JP10472194A
Publication Date:
October 31, 1995
Filing Date:
April 18, 1994
Export Citation:
Assignee:
NIPPON STEEL CORP
International Classes:
F04C25/02; F04C27/00; (IPC1-7): F04C25/02; F04C27/00
Attorney, Agent or Firm:
Nakamae Fujio