Title:
LOW-VOLTAGE DISCHARGE GENERATING AND FIRING METHOD, VACUUM MACHINING DEVICE AND CATHODE CHAMBER OF THE DEVICE
Document Type and Number:
Japanese Patent JP3158158
Kind Code:
B2
Abstract:
PURPOSE: To improve a low-pressure are discharge and low-pressure large current discharge method, so as to be utilized in a machining process in which stringent conditions are required concerning the machining atmosphere.
CONSTITUTION: A low-pressure arc discharge is generated in a vacuum machining chamber 11 by a cathode chamber 1, having a thermionic cathode 3. A charge floating shield 20 is provided near a partition opening part 9 for drawing discharges from the cathode chamber 1 to the machining chamber 11, whereby spark can be prevented from being generated in a wall part of the machining chamber 11. The firing potential to the potential of the cathode 3 is applied to the cathode chamber wall part to ignite the discharges.
Inventors:
Jürgen Rum
Eugen Beck
Yugo Frey
Albert Zegel
Guntel Peter
Eugen Beck
Yugo Frey
Albert Zegel
Guntel Peter
Application Number:
JP11843593A
Publication Date:
April 23, 2001
Filing Date:
May 20, 1993
Export Citation:
Assignee:
Unaxis Balzers Akchen Gesell Shaft
International Classes:
C23F4/02; C23C14/24; C30B25/02; H01J37/06; H01J37/30; H01J37/32; H01J37/34; H05H1/48; (IPC1-7): H01J37/06
Domestic Patent References:
| JP3233835A | ||||
| JP62278736A | ||||
| JP443543A |
Attorney, Agent or Firm:
Shoichi Ui (4 others)