Title:
SHAPE INSPECTION DEVICE AND SHAPE INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2015169473
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a shape inspection device and shape inspection method for accurately acquiring information about the height of the shape of a workpiece at a high speed.SOLUTION: A plurality of segments aligned in one direction are set on a depth map S1 including height information in a surface shape of a workpiece. The type of a representative value related to the height information included in each of the pixels included in the segments is selected, and the selected representative value is determined for each segment S2. An abnormality of a specific representative value is detected from an acquired trend and is output S4.
Inventors:
SHIMODAIRA MASATATSU
KATSUYAMA HIDEKAZU
KATSUYAMA HIDEKAZU
Application Number:
JP2014043019A
Publication Date:
September 28, 2015
Filing Date:
March 05, 2014
Export Citation:
Assignee:
KEYENCE CO LTD
International Classes:
G01B11/24; G06T1/00; G06T7/00
Domestic Patent References:
| JPH02245643A | 1990-10-01 | |||
| JP2010197313A | 2010-09-09 | |||
| JP2008033750A | 2008-02-14 | |||
| JP2009186338A | 2009-08-20 | |||
| JP2005172559A | 2005-06-30 |
Foreign References:
| EP1251032A2 | 2002-10-23 |
Attorney, Agent or Firm:
Masashi Hirai
Kozu Sako
Kozu Sako