To efficiently inspect the shape of an object by a simple structure.
A position controller 122 of this shape inspection device 100 changes a light source direction by moving a light source, the source direction being a direction from a solder ball of a BGA which is an inspecting object to the light source. Points on the solder ball are determined as bright spots by a curved surface inclination calculator 132 when the direction (reflection direction) of light reflected from the solder ball coincides with a direction (visual point direction) from a pin to a visual point. An inclination of the solder ball at each of the bright spots is calculated from the coordinates of the bright spot, the source direction, etc. The height of the solder ball is found by a height calculator 136 based on the inclination of each of the bright spots.
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SUGANO JUNICHI
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| JPH10239025A | 1998-09-11 | |||
| JPH11260874A | 1999-09-24 | |||
| JPH11287628A | 1999-10-19 | |||
| JP2000131037A | 2000-05-12 | |||
| JP2003270173A | 2003-09-25 | |||
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| JP2007163266A | 2007-06-28 | |||
| JP2009042089A | 2009-02-26 | |||
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Ogata Japanese
Yasuyuki Kurose
Takuya Mitani