Title:
SHAPE MEASUREMENT METHOD, PROGRAM AND DEVICE
Document Type and Number:
Japanese Patent JP2014145711
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technique capable of measuring the shape of a target surface with improved accuracy compared to a conventional technique regardless of the wavelength of light used for measurement.SOLUTION: A shape measurement method: irradiates a target surface of a specimen to be measured with light of a first wavelength and a second wavelength to obtain phase information for the first wavelength and the second wavelength indicating the shape of the test surface; measures the shape of the target surface on the basis of the phase information for the first and the second wavelengths; calculates error information on a measurement error of the measured shape on the basis of the phase information for the first and the second wavelengths; and corrects the measured shape on the basis of the phase information for the first and the second wavelengths and the error information.
Inventors:
TOBA HIDEMITSU
Application Number:
JP2013015401A
Publication Date:
August 14, 2014
Filing Date:
January 30, 2013
Export Citation:
Assignee:
NIKON CORP
International Classes:
G01B9/02
Attorney, Agent or Firm:
Furuya History Wang
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