Title:
SHAPE MEASURING APPARATUS
Document Type and Number:
Japanese Patent JPH04357407
Kind Code:
A
Abstract:
PURPOSE:To improve the in-plane resolving power and to measure with the fine level by specifying the wavelength of a light source. CONSTITUTION:In a shape measuring apparatus 1, an interferometer 3 forms an object light 22 and a reference light 23 from a sample 11 with the use of the ultraviolet rays 5 of an SHG-Ar laser oscillator 2, and makes the lights 22, 23 interfere with each other, thereby to measure the shape of the sample 11. At this time, the wavelength of the light source 5 is shortened in order to enhance the in-plane resolving power. Moreover, the oscillator 2 having an SHG(Second Harmonic Generation) device which is suitable to stabilize the coherence and continuous oscillation is used for the light source 5. If the wavelength is not larger than 200nm, the optical parts such as a half mirror 7, condenser lenses 13, 15, etc., of the apparatus 1 are unable to secure sufficient transmittance. Therefore, the wavelength of the ultraviolet rays 5 is set to be 250+ or -20nm, so that the conditions for the light source 5 and the characteristics of the optical parts are satisfied. Accordingly, the in-plane resolving power is turned high and the fine level not larger than 1mum is ensured for the measurement.
Inventors:
OHASHI KATSUKI
SASAKI KENJI
ONO AKIRA
SASAKI KENJI
ONO AKIRA
Application Number:
JP22743091A
Publication Date:
December 10, 1992
Filing Date:
September 06, 1991
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01B9/02; G01B11/24; (IPC1-7): G01B9/02; G01B11/24
Attorney, Agent or Firm:
Takehiko Suzue
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