形状測定装置および該方法 - KABUSHIKI KAISHA KOBE SEIKO SHO

Title:

形状測定装置および該方法

Document Type and Number:

Japanese Patent JP5379029

Kind Code:

B2

Abstract:

To provide a shape measuring apparatus capable of highly accurately measuring the surface shape of an object to be measured, and to provide a shape measuring method.

The shape measuring apparatus S measures the thickness of an object to be measured WA by a one-surface measuring section 2 and an another-surface measuring section 3 for performing optical heterodyne interference, and measures the thickness and surface shape of the object to be measured WA by a single measurement, by having the object to be measured irradiated by the one-surface measuring section 2 with a plurality of measuring lights.

More Like This:

JPH03170003	LIGHT CUTTING INSPECTION METHOD
JP2720759	[Title of Invention] Bonding Wire Appearance Automatic Inspection Device
WO/2015/120852	DEVICE AND METHOD FOR GENERATING IMAGE INFORMATION FROM AN OBJECT TO BE CAPTURED

Inventors:

Amanaka
Kajita Masakazu
Eiji Takahashi

Application Number:

JP2010006653A

Publication Date:

December 25, 2013

Filing Date:

January 15, 2010

Export Citation:

Click for automatic bibliography generation Help

Assignee:

KABUSHIKI KAISHA KOBE SEIKO SHO

International Classes:

G01B11/24; G01B9/02; G01B11/06

Domestic Patent References:

JP20108150A
JP2008180708A
JP2007504444A

Attorney, Agent or Firm:

Etsushi Kotani
Masataka Otani
Satoshi Sakurai

Previous Patent: HERBICIDE COMPOSITION

Next Patent: DUNGICIDE COMPOSITION FOR AGRICULTURE AND HORTICULTURE