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Patent Searching and Data


Title:
SHAPE MEASURING DEVICE
Document Type and Number:
Japanese Patent JPH09101126
Kind Code:
A
Abstract:

To measure a concave large aperture surface to be inspected wholly in a state as it is in which self-weight deformation is added within a range where a measuring device can be arranged.

The shape measuring device is composed of an interferometer main body 1, a condenser lens 2, a reflector 3 having a reflecting face, a turning mechanism 6 giving the reflector 3 turning of a predetermined angle, a hold and adjust mechanism 5 holding and adjusting an object to be inspected 4, an image pickup means 10 detecting the interference fringe of the interferometer main body 1 as image information, and a processing means image-processing the image information.


Inventors:
ICHIKAWA HAJIME
Application Number:
JP25616095A
Publication Date:
April 15, 1997
Filing Date:
October 03, 1995
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G01B9/02; G01B11/24; G01B11/30; G01M11/00; (IPC1-7): G01B11/24; G01B9/02; G01B11/30; G01M11/00