Title:
SHAPE MEASURING MACHINE AND ALIGNMENT METHOD FOR SHAPE MEASURING MACHINE
Document Type and Number:
Japanese Patent JP2022129886
Kind Code:
A
Abstract:
To provide a shape measuring machine and an alignment method for a shape measuring machine that can adjust a detection direction and a movement direction of a probe to improve accuracy of displacement measurement.SOLUTION: A shape measuring machine (10-1, 10-2) comprises: a stage rotation mechanism that rotates a stage on which workpiece is placed around a rotation axis; a probe that detects a surface shape of the workpiece along a detection direction; a probe rotation mechanism that rotates the probe around a probe rotation axis; a direct acting mechanism that moves the probe along a direct acting movement direction; a bus bar alignment mechanism that moves the probe along a bus bar adjustment direction perpendicular to the direct acting movement direction; rotation angle calculation means that moves the probe along the direct acting movement direction and the bus bar adjustment direction, and on the basis of, the positions of the probe at last at two positions, calculates an inclination in the detection direction of the probe with respect to the direct acting movement direction as a rotation angle; and drive control means that controls the probe rotation mechanism to rotate the probe by the rotation angle.SELECTED DRAWING: Figure 1
Inventors:
MORIYAMA KATSUFUMI
Application Number:
JP2021028747A
Publication Date:
September 06, 2022
Filing Date:
February 25, 2021
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
G01B5/20; G01B11/00; G01B11/24
Attorney, Agent or Firm:
Kenzo Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura
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