PURPOSE: To heat a shape memory actuator with higher efficiency than a conventional method of conducting the shape memory material directly and carry out driving with low voltage by forming a resistance heating element at the surface of a shape memory material, and conducting the resistance heating element.
CONSTITUTION: For this shape memory actuator 3, an insulating thin film 5 consisting of silicon nitrified film or the like is formed at the surface of shape memory alloy 4 by high-frequency magnetron sputtering or the like. At this time, a resistance heating element 6 consisting of a nickel chrome alloy thin film or the like is formed at the surface of the insulating thin film 5 by vacuum deposition or the like. Since conduction and heating are carried out with the resistance heating element formed on the shape memory alloy surface, resistance value is larger than bulk metal, which permits low power driving. The time of reaching a prescribed temperature is short, thus permitting high-speed operation.
| JPH07293424 | HEAT DRIVING ACTUATOR |
| JP4434286 | External combustion engine |
OKAMOTO HIROSHI
MITSUISHI SETSUYA
MATSUI TERUYUKI
