Title:
SHAPE SETTING METHOD, SHAPE SETTING DEVICE, AND COMPUTER PROGRAM
Document Type and Number:
Japanese Patent JP2020172682
Kind Code:
A
Abstract:
To provide a technique for stably obtaining a proper shape of an opening of a shielding plate.SOLUTION: A shape setting method for setting an opening shape of a shielding plate in a plating device comprises: a generation step of generating a device model modeling the configuration of the plating device; a region setting step of setting a target region in which a shielding factor is set to be a shielding plate region included in the device model; a calculation step of calculating a distribution of current density of a cathode by using the device model; an updating step of obtaining sensitivity to the distribution when the shielding factor is updated and updating the shielding factor of the target region so that the distribution converges based on the sensitivity; a repeating step of repeating the calculation step and the updating step until a predetermined condition is satisfied; and a shape setting step of setting the opening shape in the target region based on the shielding factor when the predetermined condition is satisfied.SELECTED DRAWING: Figure 1
Inventors:
IDA NAOMA
Application Number:
JP2019074707A
Publication Date:
October 22, 2020
Filing Date:
April 10, 2019
Export Citation:
Assignee:
SUMITOMO ELECTRIC INDUSTRIES
International Classes:
C25D17/10; C25D21/12; G06F30/10; G06F30/23
Attorney, Agent or Firm:
Patent Business Corporation Suncrest International Patent Office