To improve dynamic characteristic at a low cost while maintaining low-voltage drive.
This shape variable mirror device includes: a base plate 11; a plurality of electrodes 121-12n provided on the base plate; a spacer 13 disposed on the base plate; a support member 16 disposed on the spacer, and having an opening 26 penetrating from the surface confronting with the base plate to the surface on the opposite side to the side confronting with the base plate; an insulating film 17 provided on the side surface of the support member confronting with the base plate; a deformable electrode film 18 disposed at a space opposite to the plurality of electrodes, formed to cover the opening, and supported on the support member through the insulating film; and a reflecting film 19 provided on the surface of the electrode film on the opposite side to the plurality of electrodes, wherien the plurality of electrodes are formed at least by a plurality of grooves 12a radially extending from an area including the position corresponding to the center of the opening, and the support member is disposed on the base plate through the electrode film, the insulating film and the spacer.
KOGA AKIHIRO
FURUKAWA RYO
NISHIMURA OSAMU
KOBAYASHI AKIO
KAWASHIMA HIROYUKI
TOPCON CORP
| JP2005221579A | 2005-08-18 | |||
| JPH02101402A | 1990-04-13 | |||
| JP2004535120A | 2004-11-18 | |||
| JP2002243918A | 2002-08-28 | |||
| JPH05257070A | 1993-10-08 |
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki