Title:
サブマイクロセルラ基板の非破壊検査のためのシェアログラフィ
Document Type and Number:
Japanese Patent JP7255980
Kind Code:
B2
Abstract:
Provided is a method and system for dynamic shearographic inspection. The dynamic shearographic method allows nondestructive inspection of layered materials, in particular, those including a porous material. The method uses a load profile that increases and decreases the load, for example in a saw-tooth manner, without decreasing the load back down to the initial loading state, usually zero loading. Using the load profile in this manner constantly refreshes the reference speckle images to minimize background noise and allows defects to be distinguished from the noise.
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Inventors:
Sapphire, Morteza
One, Xiaoshi
One, Xiaoshi
Application Number:
JP2018114255A
Publication Date:
April 11, 2023
Filing Date:
June 15, 2018
Export Citation:
Assignee:
The Boeing Company
International Classes:
G01N17/00; G01N21/88; G01N19/08; G01N21/95; G01N25/72
Domestic Patent References:
| JP2001066259A | ||||
| JP2007505313A | ||||
| JP2002303512A | ||||
| JP2009115810A |
Foreign References:
| US5257088 | ||||
| WO2006001712A2 |
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation