To provide a sheet-like connector which can hold high contact reliability over a long period of time, and can attain electrical connection in the state that a resistance is small enough to a metal electrode of a semiconductor equipment which should be connected, and its manufacturing method, an electrical equipment connection device, and an inspection equipment.

The sheet-like connector is formed of two or more penetration electrical conduction parts, which penetrate and are extended in the thickness direction, in a mutually insulated state; a barrier layer which consists of a diffusion-resistant metal is prepared in the surface of the penetration electrical conduction part which makes contacts oppositely with a metal electrode of an electric equipment which should be connected. Moreover, an edge is formed in a part contacting oppositely of the penetration electrical conduction part, which oppositely contacts with the metal electrode of the electrical equipment which should be connected.