To provide a sheet plasma apparatus capable of removing reaction products formed on an anode.
The sheet plasma apparatus 100 comprises: a pressure-reducible container 60 whose inside can be pressure-reduced; a plasma gun 10; a planar anode 51 receiving plasma at the inside of the pressure-reducible vessel; a sheet plasma deforming tank 20 formed so as to form a part of the pressure-reducible vessel, fluidizing columnar plasma 22 to the inside thereof and deforming the columnar plasma into sheet-shaped plasma 27; a film deposition tank 30 formed so as to form a part of the pressure-reducible vessel; a rotary mechanism 75 rotating the anode; a permanent magnet 52 arranged at the back of the anode and also on the central axis 22 of the columnar plasma; a cleaning member 76 arranged at a position far from the sheet-shaped plasma so as to be confronted with the front face of the anode; a pressing mechanism 81 pressing the cleaning member against the anode; and a shielding plate 82 arranged between the cleaning member and the sheet-shaped plasma.
YAMAKAWA KENJI
KOZUKA TAKESHI
MURASHITA YOSHIAKI
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