Title:
シート貼付装置およびシート貼付方法
Document Type and Number:
Japanese Patent JP7149775
Kind Code:
B2
Abstract:
To provide a sheet sticking apparatus and a sheet sticking method that can accurately adhere an adhesive sheet to a predetermined position on an adherend.SOLUTION: In a sheet sticking apparatus EA, the position of an adhesive sheet AS in a material RS held by material holding means 21 is detected, and the adhesive sheet AS in the material RS held by the material holding means 21 and an adherend WF supported by adherend support means 30 are relatively approached to each other, and a release sheet RL supporting the adhesive sheet AS is prevented from being loosened, pulled, or fluctuating by pressing the adhesive sheet AS against the adherend WF, the accurate position of the adhesive sheet AS is detected, and the adhesive sheet AS can be accurately adhered to a predetermined position of the adherend WF.SELECTED DRAWING: Figure 1
Inventors:
Yoshiaki Sugishita
Application Number:
JP2018166858A
Publication Date:
October 07, 2022
Filing Date:
September 06, 2018
Export Citation:
Assignee:
LINTEC CORPORATION
International Classes:
H01L21/683
Domestic Patent References:
| JP2015162523A | ||||
| JP2013235635A | ||||
| JP2015154033A | ||||
| JP2008285285A | ||||
| JP2010272755A | ||||
| JP2010208683A | ||||
| JP2013001436A |
Attorney, Agent or Firm:
Takahiro Yamazaki
Takahiro Ogihara
Noriko Hisada
Takahiro Ogihara
Noriko Hisada
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