Title:
SHEET SUBSTRATE PROCESSING SYSTEM
Document Type and Number:
Japanese Patent JP3512322
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a sheet substrate processing system by separating a region of a front side from a region of the rear side of the substrate such that a processing liquid of one region does not intrude into other regions.
SOLUTION: A processing liquid for a front side 1a of a substrate is supplied to an upper cover 3 from a processing liquid supply port 3a, and a processing liquid for a rear side 1b of the substrate is supplied to a spin base 2 from a processing liquid supply port 2a. The spin base 2 is provided with a substrate mount base 21 and a claw 22 to fixedly support the substrate 1. The upper cover 3 and a partition 4 constitute a discharge path 3b for a waste liquid after the processing of the front side 1a of the substrate, and the partition 4 and a lower cover 5 constitute a discharge path 2b for a waste liquid after the processing of the rear side 1b of the substrate. A rib 21b is formed to an outer wall of the substrate mount base 21 and ribs 41a, 41b are formed to an inner wall of the partition 4. The rib 21b is inserted in contactless manner between the ribs 41a and 41b to constitute a labyrinthian structure to prevent the processing liquid after processing the front side 1a of the substrate from infiltrating into the rear side 1b of the substrate.
Inventors:
Muraoka, Yusuke
Miya, Katsuhiko
Miya, Katsuhiko
Application Number:
JP34522997A
Publication Date:
March 29, 2004
Filing Date:
December 15, 1997
Export Citation:
Assignee:
DAINIPPON SCREEN MFG CO LTD
International Classes:
G03F7/16; B05C11/08; H01L21/027; H01L21/304; H01L21/306; (IPC1-7): H01L21/304; B05C11/08; G03F7/16; H01L21/027; H01L21/306
Attorney, Agent or Firm:
小笠原 史朗