PURPOSE: To keep decomposition of an inner shield and a holder shield ring from being obstructed by a sputtering film.

CONSTITUTION: This is a shield body of a sputtering device consisting of an inner shield 1 having a hole of a fairly larger diameter than a wafer 5 and a holder shield ring 2 mounted on the side of the wafer 5 on the inner shield 1 having a hole approximate to a diameter of the wafer 5 of a smaller inner diameter than that of the hole of the inner shield 1 and keeping the sputtering grains from a target 4 from sticking to a part excepting the wafer 5. Further, a notch 7 is ring-shapedly formed on the surface of the target 4 side of the holder shield ring 2 and the inner side 7a of the notch 7 is located near the periphery of the hole of the inner shield 1 while making a step together with a surface 7b turning to the target side of the notch 7.