Title:
SHIFTING PROCESS
Document Type and Number:
Japanese Patent JPS60160139
Kind Code:
A
Abstract:
PURPOSE:To shorten the shifting time of a chip to be processed into a processing chamber by a method wherein, when the chip to be processed is contained in the processing chamber where the atmosphere may be vacuumized or decompressed, the surface of processing chamber is provided with a butterfly valve for tacking the chip to be processed while the sidewalls thereof are provided with gate valves. CONSTITUTION:When a semiconductor chip 6d etc. is contained in a processing chamber 11 to be implanted with ion or etched, the middle step of processing chamber 11 is provided with a butterfly valve 13 with its periphery made airtight using a packing 15 to form an auxiliary chamber 12 wherein a transit stand 16 is protruded below the valve 13. Within the processing chamber 11 so far constituted, the chip 6d is tacked on the surface of valve 13 which is turned on an axle 14 to locate the chip 6d on the backside of valve 13. Next the transit stand 16 is lifted to receive the chip 6d on its surface and after resetting to its original position, the auxiliary chamber 12 is vacuumized to perform specified processing. Later the processed chip 6d may be taken out of the chamber 12 through the intermediary of gate valves 17, 18.
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Inventors:
SAITOU YOSHITAKA
Application Number:
JP1488984A
Publication Date:
August 21, 1985
Filing Date:
January 30, 1984
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
H01J37/20; C23C14/56; C23F1/00; H01J37/317; H01L21/265; H01L21/302; H01L21/3065; H01L21/67; H01L21/677; H01L21/68; (IPC1-7): C23C14/56; C23F1/00; H01J37/20; H01J37/317; H01L21/265; H01L21/302
Attorney, Agent or Firm:
Sadaichi Igita