Title:
【発明の名称】気相成長装置
Document Type and Number:
Japanese Patent JP3230162
Kind Code:
B2
Inventors:
Takehiko Kobayashi
Shinichi Mitani
Yoshinori Nakagawa
Shinichi Mitani
Yoshinori Nakagawa
Application Number:
JP12224191A
Publication Date:
November 19, 2001
Filing Date:
April 24, 1991
Export Citation:
Assignee:
Toshiba Machine Co., Ltd.
International Classes:
C30B25/12; C23C16/44; H01L21/205; (IPC1-7): H01L21/205; C23C16/44; C30B25/12
Domestic Patent References:
| JP1298088A | ||||
| JP1144620A | ||||
| JP61219130A | ||||
| JP3224223A | ||||
| JP2131335U |