Title:
短波長紫外線放電灯及び紫外線照射処理装置
Document Type and Number:
Japanese Patent JP5092329
Kind Code:
B2
Abstract:
An ultraviolet discharge lamp comprising an insulated conductor coated with a fluororesin and radiating ultraviolet-rays having a wavelength of 220 nm or less, in which generation of hydrogen fluoride and hydrofluoric acid harmful to the human body and causing reduction in quantity of radiation light is suppressed. The discharge lamp comprises a quartz glass tube (31), a pair of electrodes (32a, 32b) arranged at the opposite ends thereof, and a lead wire (60) extending along the outer wall of the quartz glass tube. The lead wire is obtained by covering an insulated conductor coated with an insulator composed of a fluororesin with a metal outer layer material. Since the fluororesin is not irradiated with ultraviolet rays while the lead wire is irradiated with ultraviolet-rays, hydrogen fluoride and hydrofluoric acid are not generated.
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Inventors:
Koji Nakano
Koji Emura
Yuko Sumiya
Noriko Tsujinaka
Koji Emura
Yuko Sumiya
Noriko Tsujinaka
Application Number:
JP2006261461A
Publication Date:
December 05, 2012
Filing Date:
September 26, 2006
Export Citation:
Assignee:
Kurita Water Industries Ltd.
International Classes:
H01J61/36; B01J19/12; C02F1/32; G21K5/00; H01J61/34; H01J61/54
Domestic Patent References:
| JP2002282851A | ||||
| JP10040743A | ||||
| JP2002373625A | ||||
| JP2007220549A |
Attorney, Agent or Firm:
Saichi Suyama
Yukio Kawahara
Satoshi Yamashita
Hideaki Suyama
Yukio Kawahara
Satoshi Yamashita
Hideaki Suyama