Title:
シャワーヘッド及びその製造方法
Document Type and Number:
Japanese Patent JP7052796
Kind Code:
B2
Abstract:
A showerhead provided in a chamber of a semiconductor manufacturing apparatus and facing a wafer holder includes: a disk-shaped member having a plurality of through holes penetrating the disk-shaped member in a direction of a thickness thereof; a high-frequency conductor embedded in the disk-shaped member; a hole provided in the disk-shaped member, extending in the direction of the thickness of the disk-shaped member and having a bottom exposing a portion of the conductor; an electrode terminal portion disposed in the hole and having a base portion electrically connected to the conductor and a columnar portion provided on the base portion; a cylindrical member having a first end portion fitted outside the columnar portion and facing the conductor and a second end portion facing away from the first end portion, and a sealing member surrounding the first end portion.
Inventors:
Kimura Koichi
Akira Mikumo
Akira Mikumo
Application Number:
JP2019532449A
Publication Date:
April 12, 2022
Filing Date:
June 25, 2018
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
H01L21/3065; C23C16/455; C23C16/505; H01L21/205
Domestic Patent References:
| JP2017022284A | ||||
| JP2016122724A | ||||
| JP2013143512A | ||||
| JP2012204497A |
Foreign References:
| US20170032935 |
Attorney, Agent or Firm:
Fukami patent office