Title:
シャッター装置
Document Type and Number:
Japanese Patent JP6955025
Kind Code:
B2
Abstract:
A shutter device includes a movable shading module (1) and a movement control module (2) configured to control movement of the movable shading module (1). The movable shading module (1) includes a shading unit (30), a driving unit (40) and a signal measuring unit (20). The shading unit (30) includes two blades (302), and the movement control module (2) is configured to generate a control signal. The driving unit (40) is configured to receive the control signal and drive the two blades (302). The signal measuring unit (20) is configured to measure an operating status of the blades (302) feed it back to the movement control module (2) in real time. The movement control module (2) is configured to update the control signal based on the fed back operating status. This shutter device can overcome the problems of low exposure dose accuracy and light leaks arising from the use of existing shutters and provide various accurately-controlled exposure doses suitable for different applications.
Inventors:
Ohiko Fei
Shohei
Kakesho
Shohei
Kakesho
Application Number:
JP2019553064A
Publication Date:
October 27, 2021
Filing Date:
August 09, 2017
Export Citation:
Assignee:
Shanghai Micro Electronics Equipment (Group) Company Limited
International Classes:
G03F7/20; G02B26/02; G03B9/08; G03B9/14; G03B9/58
Domestic Patent References:
| JP11111612A | ||||
| JP11219893A | ||||
| JP11233423A | ||||
| JP2002359173A | ||||
| JP2008182873A | ||||
| JP2010107831A |
Attorney, Agent or Firm:
Hiroshi Oue