Title:
信号に基づく試料の調製
Document Type and Number:
Japanese Patent JP6599513
Kind Code:
B2
Inventors:
Frank Lizon
Yens Glizer
Matthias Langhorst
Yens Glizer
Matthias Langhorst
Application Number:
JP2018098394A
Publication Date:
October 30, 2019
Filing Date:
May 23, 2018
Export Citation:
Assignee:
FEI COMPANY
International Classes:
G01N1/28
Domestic Patent References:
| JP2011508185A | ||||
| JP2010520487A | ||||
| JP2003177108A | ||||
| JP2012149992A | ||||
| JP2002514762A | ||||
| JP2011089813A | ||||
| JP2007192821A |
Foreign References:
| US20090126373 | ||||
| US20100240021 | ||||
| WO2011105507A1 | ||||
| US20130029407 | ||||
| US20060068375 | ||||
| US20070172100 | ||||
| US20120135458 | ||||
| US20110224574 |
Attorney, Agent or Firm:
Tadashige Ito
Tadahiko Ito
Shinsuke Onuki
Tadahiko Ito
Shinsuke Onuki