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Title:
SIGNAL PROCESSOR
Document Type and Number:
Japanese Patent JP2006300746
Kind Code:
A
Abstract:

To calculate a phase difference quickly and precisely.

This processor is provided with an A/D conversion part 22 for sampling two alternating current signals respectively at a preset prescribed period, and for converting those into alternating current data indicating level values in the respective samplings, digital filters 23a, 23b for filtering respectively the alternating current data x(k), y(k) of preset prescribed frequency out of the two alternating current data output therefrom, differentiating operation circuits 33, 34 for computing two alternating current data x'(k), y'(k) obtained by differentiating the two alternating current data x(k), y(k) of prescribed frequency output therefrom, and a phase difference computing circuit 26 for computing the phase difference ψ of the two alternating current data x(k), y(k), using the alternating current data x(k), y(k) output from the digital filters 23a, 23b and the two alternating current data x'(k), y'(k) output from the differentiating operation circuits 33, 34.


Inventors:
TANAKA RYOHEI
KITANO TOYOKAZU
Application Number:
JP2005123270A
Publication Date:
November 02, 2006
Filing Date:
April 21, 2005
Export Citation:
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Assignee:
DAIHEN CORP
International Classes:
H01L21/3065; G01R25/00
Domestic Patent References:
JP2004096871A2004-03-25
JPH0645832A1994-02-18
JPH11287830A1999-10-19
JPH1090311A1998-04-10
JP2000338141A2000-12-08
JPH06188683A1994-07-08
JPH11308075A1999-11-05
JPH0546168A1993-02-26
JP2004214963A2004-07-29
Attorney, Agent or Firm:
Minoru Yoshida
Tatsuya Tanaka
Tsukasa Senba
Takashi Shiotani
Hiroshi Furusawa



 
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