Title:
炭化ケイ素半導体装置および炭化ケイ素半導体装置の製造方法
Document Type and Number:
Japanese Patent JP5428116
Kind Code:
B2
Inventors:
Shinsuke Harada
Tsutomu Yao
Kenji Fukuda
Mitsuo Okamoto
Kazuhiro Adachi
Seiji Suzuki
Tsutomu Yao
Kenji Fukuda
Mitsuo Okamoto
Kazuhiro Adachi
Seiji Suzuki
Application Number:
JP2010245409A
Publication Date:
February 26, 2014
Filing Date:
November 01, 2010
Export Citation:
Assignee:
National Institute of Advanced Industrial Science and Technology
Sanyo Electric Co., Ltd.
Sanyo Electric Co., Ltd.
International Classes:
H01L29/78; H01L21/04; H01L21/336; H01L29/12; H01L29/10; H01L29/24; H01L29/423
Domestic Patent References:
| JP5259443A | ||||
| JP10284733A |
Attorney, Agent or Firm:
Kenzo Fukuda
Shinichi Fukuda
Kyosuke Kato
Shinichi Fukuda
Kyosuke Kato