Title:
炭化珪素単結晶基板および炭化珪素エピタキシャル基板
Document Type and Number:
Japanese Patent JP6465193
Kind Code:
B2
Inventors:
Tsubasa Tsubasa
Kyoko Okita
Kyoko Okita
Application Number:
JP2017228185A
Publication Date:
February 06, 2019
Filing Date:
November 28, 2017
Export Citation:
Assignee:
Sumitomo Electric Industries, Ltd.
International Classes:
C30B29/36; C23C16/02; C23C16/42; C30B23/06; H01L21/205; H01L21/304
Domestic Patent References:
| JP2008290898A | ||||
| JP2013212951A | ||||
| JP2012035188A | ||||
| JP2013529389A | ||||
| JP2006321707A |
Attorney, Agent or Firm:
Fukami patent office