Title:
Silicon carbide semiconductor device
Document Type and Number:
Japanese Patent JP6238854
Kind Code:
B2
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Inventors:
Koyama Koyo
Hidenori Tsuji:
Hidenori Tsuji:
Application Number:
JP2014160036A
Publication Date:
November 29, 2017
Filing Date:
August 06, 2014
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
H01L29/872; H01L21/822; H01L27/04; H01L29/47
Domestic Patent References:
| JP2010205833A | ||||
| JP2007141986A | ||||
| JP2009224661A | ||||
| JP2006086417A | ||||
| JP2013145831A |
Attorney, Agent or Firm:
Yoshitake Hidetoshi
Takahiro Arita
Takahiro Arita