SILICON NITRIDE TARGET - Mitsubishi Materials Corporation

Title:

SILICON NITRIDE TARGET

Document Type and Number:

Japanese Patent JP3481259

Kind Code:

B2

Abstract:

PURPOSE: To facilitate the sintering of an Si3N4 target.
CONSTITUTION: When Si powder as a binder is added to Si3N4 powder as a base and they are sintered, the Si powder is rapidly diffused in the Si3N4 powder and they are surely joined to form an Si3N4 target. Since the Si powder is an oxygen-free binder, the formation of impurities is inhibited at the time of sintering.

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Inventors:

Fumio Nada
Souichi Fukui
Yukihiro Ouchi

Application Number:

JP7191991A

Publication Date:

December 22, 2003

Filing Date:

April 04, 1991

Export Citation:

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