Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
SILICON NITRIDE TOOL AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH11129103
Kind Code:
A
Abstract:

To provide a highly strong silicon nitride tool and its manufacturing method.

For a ceramic chip 1, a wear-resistant hard coating 3 is formed on the surface of a conductive silicon nitride base material 2. The silicon nitride base material 2 is formed by dispersing conductive compound (TiCN, e.g.) into the silicon nitride material in a range of 10-60 volume %. In this way, the specific resistance of the silicon nitride base material 2 is set to be 4.0×10-2-1.0×10-1 Ω.cm. For the hard coating 3, hard material (TiN, e.g.) is formed on the surface of the silicon nitride base material 2 by a physical evaporation method for improving wear resistance, to be 1-5 μm thick.


Inventors:
MATSUBARA MASARU
Application Number:
JP29714897A
Publication Date:
May 18, 1999
Filing Date:
October 29, 1997
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
NGK SPARK PLUG CO
International Classes:
B23C5/16; B23B27/14; C23C14/06; (IPC1-7): B23B27/14; B23C5/16; C23C14/06
Attorney, Agent or Firm:
Adachi Tsutomu



 
Previous Patent: SLIDE LOCK FOR STAMPING PRESS

Next Patent: SPINDLE STRUCTURE