To prevent molten silicon from being contaminated caused by dropping of an impurity condensate from an impurity capturing device arranged in an upper side of a crucible, in a silicon refining method by vacuum melting.
This silicon refining apparatus is arranged with the crucible 4 for storing the molten silicon 3 and a heating means 5 for heating the crucible 4, in an inside of a treating chamber 2 equipped with a vacuum pump 1, and is arranged further with the impurity capturing device having an impurity condensing part for cooling an impurity vapor evaporated from a liquid face of the molten silicon, to be condensed, and a contamination preventive device having an impurity receiving part for receiving an impurity, when the impurity captured by the impurity capturing device drops, to prevent the molten silicon from being contaminated.
| WO/2010/137555 | PROCESS FOR PRODUCING REFINED METAL OR METALLOID |
| JP4980793 | Silicon recovery method and silicon recovery device |
| JP2006199511 | CRYSTAL PRODUCTION APPARATUS |
Katsuo Naruse
Tomohiro Nakamura
Masashi Torino
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