Title:
シリコン基板の加工方法及び液体吐出ヘッドの製造方法
Document Type and Number:
Japanese Patent JP5814654
Kind Code:
B2
More Like This:
Inventors:
Terasaki Atsunori
Atsushi Hiramoto
Masahiko Kubota
Ryoji Kiri
Nohyuki Fukumoto
Akihiko Okano
Atsushi Hiramoto
Masahiko Kubota
Ryoji Kiri
Nohyuki Fukumoto
Akihiko Okano
Application Number:
JP2011140644A
Publication Date:
November 17, 2015
Filing Date:
June 24, 2011
Export Citation:
Assignee:
Canon Inc
International Classes:
B41J2/16; B41J2/14; B81C1/00; B81C3/00
Domestic Patent References:
JP2009126161A | ||||
JP11010896A | ||||
JP2001071503A | ||||
JP5299409A | ||||
JP8132628A |
Attorney, Agent or Firm:
Akio Miyazaki
Masaaki Ogata
Masaaki Ogata