Title:
シリコンウェーハの製造方法
Document Type and Number:
Japanese Patent JP4151876
Kind Code:
B2
Inventors:
Yasuo Koike
Application Number:
JP2000238999A
Publication Date:
September 17, 2008
Filing Date:
August 07, 2000
Export Citation:
Assignee:
Sumco inc.
International Classes:
C30B29/06; H01L21/322; H01L21/205
Domestic Patent References:
| JP58197716A | ||||
| JP60094722A | ||||
| JP3184345A | ||||
| JP8290995A |
Attorney, Agent or Firm:
Michio Mori