Title:
シルセスキオキサン樹脂及びオキサアミン組成物
Document Type and Number:
Japanese Patent JP7265356
Kind Code:
B2
Abstract:
A silsesquioxane-containing composition comprising a silsesquioxane resin and an oxaamine of formula (II) (see description), products prepared therefrom, photoresist compositions comprising the silsesquioxane-containing composition and a photoacid generator, products prepared therefrom, methods of making and using same, and manufactured articles and semiconductor devices containing same.
Inventors:
Pen-Fay Who
Won Bum Jean
Won Bum Jean
Application Number:
JP2018557410A
Publication Date:
April 26, 2023
Filing Date:
April 27, 2017
Export Citation:
Assignee:
Dow Silicones Corporation
International Classes:
C08L83/06; C08G77/38; C08K5/17; G03F7/004; G03F7/075; G03F7/20; H01L21/027
Domestic Patent References:
| JP2007133185A | ||||
| JP2007133266A | ||||
| JP2009543135A | ||||
| JP2007536386A | ||||
| JP2009542859A | ||||
| JP10326015A |
Foreign References:
| WO2008001782A1 |
Attorney, Agent or Firm:
Aoki Atsushi
Shinji Mihashi
Junichi Tsuruta
Tomohiro Nanzan
Youichi Watanabe
Naonori Koda
Satoshi Deno
Shinji Mihashi
Junichi Tsuruta
Tomohiro Nanzan
Youichi Watanabe
Naonori Koda
Satoshi Deno
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