Title:
SIMPLE LAMP DESIGN
Document Type and Number:
Japanese Patent JP2023081978
Kind Code:
A
Abstract:
To provide a simplified technique for a high voltage tungsten halogen lamp used as a heat radiation source in a rapid thermal processing (RTP) chamber and other lamp heated thermal processing chambers.SOLUTION: A lamp assembly 300 includes a capsule 302 having a filament 304 disposed therein, a press seal 312 extending from the capsule and configured to hermetically seal the capsule, first and second leads and a third lead 311 extending from the press seal, and a fuse 318 electrically coupling the third lead to one of the first and second leads external to the press seal and capsule.EFFECT: An external fuse is provided to reduce the parts count and cost of prior art lamps. Further, the lamp embodiments described herein adhere to a simple fuse design while being sufficiently rigid to handle compressive forces during insertion of the lamp into a heating assembly base.SELECTED DRAWING: Figure 3A
Inventors:
JOSEPH M RANISH
Application Number:
JP2023035503A
Publication Date:
June 13, 2023
Filing Date:
March 08, 2023
Export Citation:
Assignee:
APPLIED MATERIALS INC
International Classes:
H01K1/66; H01K1/38
Attorney, Agent or Firm:
Sonoda & Kobayashi Patent Attorneys Corporation
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