Title:
SIMULATION DEVICE AND SIMULATION METHOD
Document Type and Number:
Japanese Patent JP2003133200
Kind Code:
A
Abstract:
To facilitate grasping of the state inside the device.
A simulation device 20A has an operation terminal 21, a display section 22, a simulation section 23, and a unit shape data 24. The simulation section 23 is linked to an actual exposure device, in real time and execute a 3D simulation, following the operation of a respective control object unit 13 (control command). The control command is transferred from a device controller 12 to the control object unit 13, and also simultaneously to an simulation section 23. After receiving the control command, the simulation section 23 executes simulation, by operating the control object unit 13 as the control command commands.
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Inventors:
Tezuka, Nobuhiko
Ozawa, Kunitaka
Ozawa, Kunitaka
Application Number:
JP2001000322581
Publication Date:
May 09, 2003
Filing Date:
October 19, 2001
Export Citation:
Assignee:
CANON INC
International Classes:
G03F7/20; G05B17/02; H01L21/00; H01L21/027; (IPC1-7): H01L21/027; G03F7/20; H01L21/00