Title:
単結晶製造装置及び単結晶製造方法
Document Type and Number:
Japanese Patent JP3980136
Kind Code:
B2
Inventors:
Kurosaka Nori
Junsuke Tomioka
Junsuke Tomioka
Application Number:
JP30330797A
Publication Date:
September 26, 2007
Filing Date:
October 20, 1997
Export Citation:
Assignee:
sumco tech xiv Co., Ltd.
International Classes:
C30B15/00; C30B15/32; C30B29/06; H01L21/02; H01L21/208
Domestic Patent References:
| JP9249491A | ||||
| JP4089558U | ||||
| JP60176990A | ||||
| JP11079882A |
Foreign References:
| US4594127 |
Attorney, Agent or Firm:
Hideharu Tanaka
Yukihiro Tsuda
Yukihiro Tsuda