Title:
単結晶の製造方法及び単結晶製造装置
Document Type and Number:
Japanese Patent JP4496723
Kind Code:
B2
Inventors:
Ryoji Hoshi
Wataru Sato
Fusegawa Izumi
Wataru Sato
Fusegawa Izumi
Application Number:
JP2003183672A
Publication Date:
July 07, 2010
Filing Date:
June 27, 2003
Export Citation:
Assignee:
Shin-Etsu Semiconductor Co., Ltd.
International Classes:
C30B15/28; C30B29/06
Domestic Patent References:
| JP2000178099A | ||||
| JP4257241A | ||||
| JP2002326888A | ||||
| JP2000086384A | ||||
| JP2000159595A | ||||
| JP8268794A | ||||
| JP2000335993A | ||||
| JP10114597A |
Attorney, Agent or Firm:
Mikio Yoshimiya